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Reported 11/05/2021 12:00 AM
Project Title

Cleanroom Deep Reactive Ion Etcher Plasama Dep

Physical Address View project details and contacts
City, State (County) Eugene, OR   (Lane County)
Category(s) Single Trades
Sub-Category(s) Mechanical
Contracting Method Competitive Bids.
Project Status Request for Proposals (RFPs)
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Estimated Value
Plans Available from State Agency
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Description

To purchasing a Deep Reactive Ion Etcher, “BOSCH” style system. The tool will be the etch tool for Silicon substrates and will also serve as our primary plasma etch system. To procure an Plasma Enhanced Chemical Vapor deposition system (PECVD) and/or a Inductively Coupled Plasma Chemical Vapor Deposition system (ICP-CVD)

Details

Division 02 - Existing Conditions, Physical Decontamination, Mechanical Filtration Decontamination.

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Project Documents
 Engineered Spec Sheet
 Architectural Plans
 Other Documents